sti field oxide
WithitszerooxidefieldencroachmentSTIismoresuitablefortheincreaseddensityrequirements,becauseitallowstoformsmallerisolationregions.The ...,由KShiozawa著作·1999·被引用9次—WeconcludedthatSTI,inwhichtheoriginalfieldoxideabruptlyprojectsabovethesubstr...
Advantage of Shallow Trench Isolation over Local ...
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由KShiozawa著作·1999·被引用9次—WeconcludedthatSTI,inwhichtheoriginalfieldoxideabruptlyprojectsabovethesubstratesurface,hasanadvantageovertheLOCOSnotonlyagainst ...
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